有更多的技术及应用需求请联系公司销售工程师:欧玉涛 137-1885-8581 Air-Bearing Rotary Stage Aerotech’s ABR1000 rotary air-bearing stage provides superior angular positioning, velocity stability, and error motion performance. It is designed to meet the exacting requirements for wafer inspection, DVD mastering, disk drive test and servo writing, optical inspection and fabrication, and MEMS/nanotechnology device fabrication. Superior Mechanical Design The ABR1000 is designed with large air-bearing surfaces for high stiffness and load capacity in a low profile design. This design produces not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles in the marketplace, greatly benefiting applications requiring exceptional planar performance. Brushless Direct-Drive To maximize positioning performance, the ABR1000 utilizes Aerotech’s S-series slotless, brushless motor. This motor represents the latest in rotary motor technology. The motor uses an advanced magnetic circuit design to produce Direct-drive slotless brushless servomotor Zero cogging motor for outstanding velocity stability Outstanding error motion and wobble performance Direct coupled, high accuracy rotary encoder No mechanical contact Wafer and disk accessories available high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque ripplefree. This makes the ABR1000 ideal for applications requiring smooth scan velocities at low or high speeds. Accurate Positioning Several feedback options are available. The encoders selected for this stage series are noncontacting, reflective, or interferential encoders. When coupled with Aerotech’s feedback multipliers and controls, resolutions of <0.03 arc second and positioning accuracy of <1 arc second is available. Flexible Configurations Options include integral wafer chucks, disk chucks and clamps, ESD versions, and rotary unions for air/vacuum service. Custom Designs Custom versions of the ABR1000 are available for rate table and inertial guidance test-stand applications.
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公司名: 佛山市溢升金属制品有限公司
联系人: 黄海林
电 话: 0757-63294510
手 机: 18688805750
微 信: 18688805750
地 址: 广东佛山禅城区佛山市澜石有色金属市场
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公司名: 佛山市溢升金属制品有限公司
联系人: 黄海林
手 机: 18688805750
电 话: 0757-63294510
地 址: 广东佛山禅城区佛山市澜石有色金属市场
邮 编:
网 址: hyjsfs.b2b168.com