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时间：2016-03-26

测试半导体产品测试仪美国McBain 1.. McBain DDR200 NIR and DDR300 NIR Near Infrared Subsurface Defect Detection and Review Systems The McBain DDR200 NIR (for 200mm) and DDR300 NIR (for 300mm) provide high-speed defect detection and precision measurement on wafers and other parts. These cost-efficient systems offer unique advantages for both production and process development use, providing an optimum near-infrared (900-1700nm) solution when both subsurface defect detection and dimensional metrology are required. These DDR systems feature a powerful set of automated and semi-automated optical and digital video tools, which are optimized for high accuracy, production throughput and ease of use. The automated and versatile platform features McBain's state-of-the-art near-infrared Koehler Epi-illumination as well as optional transmitted-illumination packages. All systems are configured on McBain Systems' precision multi-axis platforms. Applications · For in-process, post-process and failure analysis · Bonded wafer alignment · Die alignment (flip-chip or hybridization) · Subsurface defect visualization, detection, characterization · MEMS device inspection and metrology · 3D stacking process development and control Key Features Designed for automatic / semiautomatic operation · Extensive defect detection features and capability · Integrated dimensional metrology features · Able to penetrate thicker materials, more highly doped materials and rougher surfaces than other systems · Submicron-precision optical measurements · High-accuracy staging, to 20nm linear encoder resolution · Highest resolution 900-1700nm InGaAs digital camera in class · High-speed linear servo motor staging · 50-500 defects/measurement/second per field of view, typical · Very easy to use, program and set up · Multiple wafer/die/part handling systems available · Application-specific customizable software · Semi Standard S2/S8 compliant · -------------------------------------------------------------------------------------------- 2 . McBain DDR200 and DDR300 200mm and 300mm Defect Detection and Review Systems Download Brochure PDF Request a Quotation The McBain DDR200 and DDR300 for 200mm and 300mm wafer defect detection and review are unmatched in value and features in this special application and price category. The systems offer significant and unique advantages for both production and engineering use, and provide an ideal solution when both defect detection and dimensional metrology are required. They can be used as dedicated production tools or as versatile process development tools. Key Features · 200mm or 300mm X-Y stage · BF/DF (standard), Nomarski (optional), UV and IR versions available · Defect detection, classification and review (review-only optional) · Reflected light (standard), transmitted light for mask inspection (optional) · Video autofocus (standard), laser aut

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